Axcelis Technologies Inc $32,284,100 Nordson Corp $3,868,851 Smart Global Holdings, Inc. $161,495 Ciena Corp $340,006 Allegro Microsystems, Inc. $133,136 Axcelis Technologies Inc $32,284,100 Nordson Corp $3,868,851 Smart Global Holdings, Inc. $161,495 Ciena Corp $340,006 Allegro Microsystems, Inc. $133,136